CQT uses a variety of glass and quartz depending on the application and material requirements. Our designers and engineers are skilled at working with any number of glass and quartz materials to machine and fabricate precision optical products such as fused quartz parts for optics, fused silica parts used in fiber optic applications
CQT uses a variety of glass and quartz depending on the application and material requirements. Our designers and engineers are skilled at working with any number of glass and quartz materials to machine and fabricate precision optical products such as fused quartz parts for optics, fused silica parts used in fiber optic applications, and borosilicate glass parts found in semi-conductor manufacturing.
The general specs are as follows sheet, if your specified is not included with it, you may freely tell us and we’ll pleased to customize them for you.
spec | unit | 4" | 6" | 8" | 10" | 12” |
Diameter/size(or square) | mm | 100 | 150 | 200 | 250 | 300 |
Tolerance (±) | mm | 0.2 | 0.2 | 0.2 | 0.2 | 0.2 |
Thickness | mm | 0.10 or more | 0.30 or more | 0.40 or more | 0.50 or more | 0.50 or more |
Primary reference flat | mm | 32.5 | 57.5 | Semi-notch | Semi-notch | Semi-notch |
LTV (5mmx5mm) | µm | < 0.5 | < 0.5 | < 0.5 | < 0.5 | < 0.5 |
TTV | µm | < 2 | < 3 | <3 | <5 | <5 |
Bow | µm | ±20 | ±30 | ±40 | ±40 | ±40 |
Warp | µm | ≤ 30 | ≤ 40 | ≤ 50 | ≤ 50 | ≤ 50 |
PLTV(5mm*5mm)<0.4um | % | ≥95% | ≥95% | ≥95% | ≥95% | ≥95% |
Edge Rounding | mm | Compliant with SEMI M1.2 Standard/refer to IEC62276 | ||||
Surface Type | Single Side Polished /Double Sides Polished | |||||
Polished side Ra | nm | ≤1 | ||||
Back Side Criteria | µm | general 0.2-0.7 or customized |
Material included: : Borofloat33/B270/D263/BK7 etc.
: Eagle XG , Fused Silica 7980/7978/7979 etc.
: Fused Silica JGS1/JGS2 & Single quartz etc.
: H-K9L glass/ Soda Lime etc.
Process capability:
Item | Capability |
Diameter | 5mm - 400mm |
Thickness | 50μm or more |
Dimensional Tolerance | +/- 25μm |
Thickness Tolerance | +/- 5μm |
Thickness Variation(TTV) | < 2μm |
Flatness | 1/10 Wave/Inch |
Surface Roughness (RMS) | <5Ǻ |
Scratch and Dig | 10/5 |
Particle Size | <10μm |
Bow/Warp | <10μm |
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