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Lithium Niobate Substrate wafer parameter
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Polished as

Better than 20/10

Flatness

¦Ë ~¦Ë/8 (depends on wafer size)

Wavefront deformation

¦Ë/4~¦Ë/8 (depends on wafer size)

Size tolerance

¡À0.02mm

TTV

¡À0.01mm



3¡± X-Cut Lithium Niobate optical wave guide wafer

The Specification of 3¡± X-cut LN wafer

Orientations Variation: ¡À0.5¡ã

Wafer Flat:
Primary Flat: Perpendicular to the +Z Axis¡À0.5¡ã
Secondary Flat: 135¡ã Clockwise from the primary flat when viewing the -X polished face

Surfaces:
-X: Polished. No pits or scratches allowed within the working area (entire wafer diameter less 1.0mm around the edge). Inspected using unaided eye with reflected light.
+X: Polished. Light pits and scratches allowed within the working area (entire wafer diameter less 1.0mm around the edge). Inspected using unaided eye with reflective light.

Edge: All edges rounded with a 0.70¡À0.2 radius.

Flatness: Warp equal to or less than 0.05mm. Measured in the free state.

Total Thickness Variation (TTV):
Less than 0.01mm. Measured in the clamped state.


3" Z-Cut Lithium Niobate optical wave guide wafer



The Specification of 3¡± Z-cut LN Wafer

Orientations Variation: ¡À0.5¡ã.

Wafer Flat:
Primary Flat: Perpendicular to the -Y axis¡À0.5¡ã
Secondary Flat: 90¡ã counter-clockwise from the primary flat when viewing the -Z polished face.

Surfaces:
-Z: Polished. No pits or scratches allowed within the working area (entire wafer diameter less 1.0mm around the edge). Inspected using unaided eye with reflected light.
+Z: Polished. Light pits and scratches allowed within the working area (entire wafer diameter less 1.0mm around the edge). Inspected using unaided eye with reflected light.

Edge: All edges rounded with a 0.70¡À0.2 radius.

Flatness: Warp equal to or less than 0.05mm. Measured in the free state.

Total Thickness Variation (TTV):

Less than 0.01mm. Measured in the clamped state

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